Publication:

The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass

Date

2016

Journal article

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Author(s)

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Afanasiev, Valeri

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Baklanov, Mikhaïl

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de Marneffe, Jean-Francois

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Journal

Thin Solid Films

Statistics

1881 since deposited on 2021-10-23

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Acq. date: 2026-05-18