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The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
Publication:
The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
Date
2016
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xue, P.
;
Pei, D.
;
Zheng, H.
;
Li, W.
;
Afanasiev, Valeri
;
Baklanov, Mikhaïl
;
de Marneffe, Jean-Francois
;
Lin, Y.-H.
;
Fung, H.-S.
;
Chen, C.-C.
;
Nishi, Y.
;
Shohet, J.L.
Journal
Thin Solid Films
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1872
since deposited on 2021-10-23
Acq. date: 2025-10-25
Citations
Metrics
Views
1872
since deposited on 2021-10-23
Acq. date: 2025-10-25
Citations