Publication:

The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass

Date

2016
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Xue, P.
;
Pei, D.
;
Zheng, H.
;
Li, W.
;
Afanasiev, Valeri  
;
Baklanov, Mikhaïl
;
de Marneffe, Jean-Francois  
;
Lin, Y.-H.
;
Fung, H.-S.
;
Chen, C.-C.
;
Nishi, Y.
;
Shohet, J.L.

Journal

Thin Solid Films

Abstract

Description

Statistics

Views

1877 since deposited on 2021-10-23
1last month
Acq. date: 2026-04-05

Citations

Statistics

Views

1877 since deposited on 2021-10-23
1last month
Acq. date: 2026-04-05

Citations