Publication:

The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass

Date

2016
Journal article
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Author(s)

Xue, P.
;
Pei, D.
;
Zheng, H.
;
Li, W.
;
Afanasiev, Valeri  
;
Baklanov, Mikhaïl
;
de Marneffe, Jean-Francois  
;
Lin, Y.-H.
;
Fung, H.-S.
;
Chen, C.-C.
;
Nishi, Y.
;
Shohet, J.L.

Journal

Thin Solid Films

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1877 since deposited on 2021-10-23
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