Publication:
The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
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1875 since deposited on 2021-10-23
2last month
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Acq. date: 2026-01-11
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Views
1875 since deposited on 2021-10-23
2last month
1last week
Acq. date: 2026-01-11
Citations