Publication:
The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
Date
| dc.contributor.author | Xue, P. | |
| dc.contributor.author | Pei, D. | |
| dc.contributor.author | Zheng, H. | |
| dc.contributor.author | Li, W. | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Lin, Y.-H. | |
| dc.contributor.author | Fung, H.-S. | |
| dc.contributor.author | Chen, C.-C. | |
| dc.contributor.author | Nishi, Y. | |
| dc.contributor.author | Shohet, J.L. | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-23T17:27:24Z | |
| dc.date.available | 2021-10-23T17:27:24Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0040-6090 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27620 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0040609016304217 | |
| dc.source.beginpage | 23 | |
| dc.source.endpage | 26 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 616 | |
| dc.title | The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |