Browsing by author "Newman, Ellis"

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The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography

Humphris, Andrew; Moussa, Alain; Dusa, Mircea; Charley, Anne-Laure; Newman, Ellis; Goulden, Jenny; Feng, Lei; Bevis, Christopher (2020)