Browsing by author "Shi, Xuelong"
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Double dipole lithography for 65-nm node and beyond: a technology readiness review
Hsu, Stephen; Eurlings, Mark; Hendrickx, Eric; Van Den Broeke, Douglas J.; Chiou, Tsann-Bim; Fung Chen, J.; Laidig, Thomas L.; Shi, Xuelong; Finders, Jo (2004-08)