Browsing by author "Devloo-Casier, K"

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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films

Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph (2013)