Browsing by author "Komori, K."

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Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment

Iwasaki, A,; Higuchi, A.; Komori, K.; Sato, M.; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank (2016)
Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs

Liu, W.D.; Lee, Y.C.; Sekiguchi, R.; Yoshida, Y.; Komori, K.; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank (2018)