Browsing by author "Imai, M."

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Efficient method to generate an energy-efficient schedule using operation shuffling.

Kobayashi, Yuki; Jayapala, Murali; Raghavan, Praveen; Catthoor, Francky; Imai, M. (2008)
Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool

Eitoku, Atsuro; Snow, Jim; Vos, Rita; Sato, M.; Hirae, S.; Nakajima, K.; Nonomura, M.; Imai, M.; Mertens, Paul; Heyns, Marc (2003)