Browsing by author "Fukugami, Norihito"
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Defectivity evaluation of EUV reticles with etched multilayer image border by wafer printing analysis
Watanabe, Genta; Jonckheere, Rik; Verduijn, Erik; Fukugami, Norihito; Sakata, Yo; Kodera, Yutaka; Gallagher, Emily (2015) -
Defectivity evaluation of EUV reticles with etched multilayer image border by wafer printing analysis
Jonckheere, Rik; Verduijn, Erik; Watanabe, Genta; Fukugami, Norihito; Sakata, Yo; Kodera, Yutaka; Gallagher, Emily (2015-07) -
Impact of an etched EUV mask black border on imaging and overlay
de Kruif, Rob; Davydova, Natalia; Connolly, Brid; Fukugami, Norihito; Lammers, Ad; Philipsen, Vicky; Kondo, Shinpei; Van Setten, Eelco; Vaenkatesan, Vidya; Zimmerman, John; Harned, Noreen (2012)