Authors

Watanabe, Genta; Jonckheere, Rik; Verduijn, Erik; Fukugami, Norihito; Sakata, Yo; Kodera, Yutaka; Gallagher, Emily

Conference

Workshop NGL 2015 - The Japan Society of Applied Physics

Title

Defectivity evaluation of EUV reticles with etched multilayer image border by wafer printing analysis

Publication type

Oral presentation