Browsing by author "Kubo, Akihiro"
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Understanding and improving double patterning CDU through Monte Carlo simulation
Hooge, Joshua; Hatakeyama, Shinichi; Kubo, Akihiro; Kondo, Yoshihiro; Nafus, Kathleen; Scheer, Steven; Foubert, Philippe; Leray, Philippe; Cheng, Shaunee (2008)