Browsing by author "Peng, Hsing-Ying"
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Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)
Lukaszewicz, Mikolaj; de Marneffe, Jean-Francois; Wilson, Chris; Zhang, Liping; Peng, Hsing-Ying; Verdonck, Patrick; Baklanov, Mikhaïl (2012)