Publication:
Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)
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1860 since deposited on 2021-10-20
1last month
Acq. date: 2026-09-15
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Statistics
Views
1860 since deposited on 2021-10-20
1last month
Acq. date: 2026-09-15
Citations