Browsing by author "Urionabarrenetxea, Ainara"

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All wet strip approaches for post-etch photoresist layers after low-k patterning

Claes, Martine; Le, Quoc Toan; Kesters, Els; Lux, Marcel; Urionabarrenetxea, Ainara; Vereecke, Guy; Mertens, Paul; Carleer, R.; Adriaensens, P. (2007)