Publication:

All wet strip approaches for post-etch photoresist layers after low-k patterning

Date

2007

Proceedings Paper

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Files

14817.pdf 719.1 KB

Author(s)

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Urionabarrenetxea, Ainara

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Adriaensens, P.

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1967 since deposited on 2021-10-16

Acq. date: 2026-02-27