Browsing by author "Nakano, Teppei"
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Controlled ALE-type recess of molybdenum for future logic and memory applications
Pacco, Antoine; Nakano, Teppei; Iwasaki, Akihisa; Iwahata, Shota; Altamirano Sanchez, Efrain (2021) -
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Pacco, Antoine; Nakano, Teppei; Iwahata, Shota; Iwasaki, Akihisa; Altamirano Sanchez, Efrain (2023)