Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Controlled ALE-type recess of molybdenum for future logic and memory applications
Metadata
Show full item record
Authors
Pacco, Antoine
;
Nakano, Teppei
;
Iwasaki, Akihisa
;
Iwahata, Shota
;
Altamirano Sanchez, Efrain
DOI
10.1109/IITC51362.2021.9537407
EISBN
978-1-7281-7632-1
ISSN
2380-632X
Conference
IEEE International Interconnect Technology Conference (IITC)
Journal
na
Title
Controlled ALE-type recess of molybdenum for future logic and memory applications
Publication type
Proceedings paper
Collections
Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/41856.2
*
2023-08-10T09:11:30Z
validation by library/open access desk
1
20.500.12860/41856
2023-06-20T10:34:36Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login