dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Nakano, Teppei | |
dc.contributor.author | Iwasaki, Akihisa | |
dc.contributor.author | Iwahata, Shota | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.date.accessioned | 2023-08-10T09:12:50Z | |
dc.date.available | 2023-06-20T10:34:36Z | |
dc.date.available | 2023-08-10T09:12:50Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:000784773200023 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41856.2 | |
dc.source | WOS | |
dc.title | Controlled ALE-type recess of molybdenum for future logic and memory applications | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.orcidimec | Pacco, Antoine::0000-0001-6330-5053 | |
dc.contributor.orcidimec | Altamirano Sanchez, Efrain::0000-0003-3235-6055 | |
dc.identifier.doi | 10.1109/IITC51362.2021.9537407 | |
dc.identifier.eisbn | 978-1-7281-7632-1 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
dc.source.conferencedate | JUL 06-09, 2021 | |
dc.source.conferencelocation | Kyoto | |
dc.source.journal | na | |
imec.availability | Published - imec | |