Browsing by author "Liazouli, Remi"
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Damage free cryogenic etching of porous organosilica ultralow-k film
Zhang, Liping; Liazouli, Remi; Dussart, Rami; Lefaucheux, Philippe; Tillocher, Thomas; de Marneffe, Jean-Francois; De Gendt, Stefan; Mankelevich, Yuri; Baklanov, Mikhaïl (2012)