Publication:

Damage free cryogenic etching of porous organosilica ultralow-k film

Date

2012

Meeting abstract

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Author(s)

;

;

;

Lefaucheux, Philippe

;

Tillocher, Thomas

;

de Marneffe, Jean-Francois

;

De Gendt, Stefan

;

Mankelevich, Yuri

;

Baklanov, Mikhaïl

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Acq. date: 2026-02-25