Damage free cryogenic etching of porous organosilica ultralow-k film

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Authors
Zhang, Liping; Liazouli, Remi; Dussart, Rami; Lefaucheux, Philippe; Tillocher, Thomas; de Marneffe, Jean-Francois; De Gendt, Stefan; Mankelevich, Yuri; Baklanov, Mikhaïl
Conference
AVS 59th Annual International Symposium and Exhibition
Title
Damage free cryogenic etching of porous organosilica ultralow-k film
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Meeting abstract
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