Publication:

Damage free cryogenic etching of porous organosilica ultralow-k film

Date

2012

Meeting abstract

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Author(s)

;

;

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Lefaucheux, Philippe

;

Tillocher, Thomas

;

de Marneffe, Jean-Francois

;

De Gendt, Stefan

;

Mankelevich, Yuri

;

Baklanov, Mikhaïl

Statistics

2085 since deposited on 2021-10-20

Acq. date: 2026-10-13