Browsing by author "Mörschbächer, M.J."
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The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates
Buca, D.; Mörschbächer, M.J.; Holländer, B.; Luysberg, M.; Loo, Roger; Caymax, Matty; Mantl, S. (2004)