Authors

Buca, D.; Mörschbächer, M.J.; Holländer, B.; Luysberg, M.; Loo, Roger; Caymax, Matty; Mantl, S.

Conference

High-Mobility Group-IV Materials and Devices

Title

The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates

Publication type

Proceedings paper

Embargo date

9999-12-31