Browsing by author "Channam, Venkat Sunil Kumar"

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Direct Bonding Using Low Temperature SiCN Dielectrics

Iacovo, Serena; Nagano, Fuya; Channam, Venkat Sunil Kumar; Walsby, Edward; Crook, Kath; Buchanan, Keith; Jourdain, Anne; Vanstreels, Kris; Phommahaxay, Alain; Beyne, Eric (2022)
Low temperature SiCN as dielectric for hybrid bonding

Channam, Venkat Sunil Kumar; Iacovo, Serena; Walsby, Edward; Belov, Igor; Jourdain, Anne; Sepulveda Marquez, Alfonso; Beyne, Eric (2023)