Browsing by author "Buxbaum, Alex"
Now showing items 1-2 of 2
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Impact of AAPSM etch depth linearity in ArF immersion lithography
Cangemi, Michael; Philipsen, Vicky; Leunissen, Peter; De Ruyter, Rudi; Jonckheere, Rik; Martin, Patrick; Wakefield, Clare; Buxbaum, Alex; Morisson, Troy (2005) -
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
Philipsen, Vicky; Leunissen, Peter; De Ruyter, Rudi; Jonckheere, Rik; Martin, Patrick; Wakefield, Clare; Johnson, Stephen; Cangemi, Mike; Buxbaum, Alex; Morrison, Troy (2005)