Browsing by author "Nanakoudis, Antonis"

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Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations

Nanakoudis, Antonis; Nuytten, Thomas; Bender, Hugo; Vandervorst, Wilfried; Bals, Sara; Verbeeck, Jo (2017)