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Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
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1972 since deposited on 2021-10-24
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Acq. date: 2025-10-25
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Views
1972 since deposited on 2021-10-24
470item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations