Publication:
Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1987 since deposited on 2021-10-24
Acq. date: 2026-10-13
Citations
Statistics
Views
1987 since deposited on 2021-10-24
Acq. date: 2026-10-13
Citations