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Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
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1979 since deposited on 2021-10-24
Acq. date: 2026-04-27
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Statistics
Views
1979 since deposited on 2021-10-24
Acq. date: 2026-04-27
Citations