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Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
Publication:
Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
Date
2017
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nanakoudis, Antonis
;
Nuytten, Thomas
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Bals, Sara
;
Verbeeck, Jo
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1972
since deposited on 2021-10-24
Acq. date: 2025-10-24
Citations
Metrics
Views
1972
since deposited on 2021-10-24
Acq. date: 2025-10-24
Citations