Publication:
Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1980 since deposited on 2021-10-24
1last month
Acq. date: 2026-05-17
Citations
Statistics
Views
1980 since deposited on 2021-10-24
1last month
Acq. date: 2026-05-17
Citations