Browsing by author "Davydova, N."

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Creative metrology development for EUVL: Flare and out-of-band qualification

Lorusso, Gian; Hendrickx, Eric; Davydova, N.; Peng, Y.; Eurlings, M.; Feenstra, K.; Jiang, J. (2011)
Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.; de kruif, R.; Fukugami, N.; Kondo, S.; Philipsen, Vicky; Van Setten, E.; Connolly, B.; Lammers, A.; Vaenkatesan, V.; Zimmerman, J.; Harned, N. (2012)