Authors

Lorusso, Gian; Hendrickx, Eric; Davydova, N.; Peng, Y.; Eurlings, M.; Feenstra, K.; Jiang, J.

Conference

55th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN

Title

Creative metrology development for EUVL: Flare and out-of-band qualification

Publication type

Oral presentation

Embargo date

9999-12-31