Browsing by author "Dombrowski, Kai"
Now showing items 1-5 of 5
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Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy
Dombrowski, Kai; Fischer, A.; Dietrich, B.; De Wolf, Ingrid; Bender, Hugo; Pochet, Sandrine; Simons, Veerle; Rooyackers, Rita; Badenes, Gonçal; Stuer, Cindy; Van Landuyt, J. (1999) -
Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy
Dombrowski, Kai; Dietrich, B.; De Wolf, Ingrid; Rooyackers, Rita; Badenes, Gonçal (2001) -
Investigation of stress in STI using UV-Raman spectroscopy
Dombrowski, Kai; Dietrich, B.; De Wolf, Ingrid; Rooyackers, Rita; Badenes, Gonçal (1999) -
Stress measurements in shallow trench isolation using μ-Raman spectroscopy
Dombrowski, Kai; De Wolf, Ingrid (1998) -
Stress measurements using ultraviolet micro-Raman spectroscopy
Dombrowski, Kai; De Wolf, Ingrid; Dietrich, B. (1999)