Authors

Dombrowski, Kai; Fischer, A.; Dietrich, B.; De Wolf, Ingrid; Bender, Hugo; Pochet, Sandrine; Simons, Veerle; Rooyackers, Rita; Badenes, Gonçal; Stuer, Cindy; Van Landuyt, J.

Conference

International Electron Devices Meeting. Technical digest; 5-8 Dec. 1999; Washington, D.C., USA.

Title

Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy

Publication type

Proceedings paper