Publication:
Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy
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2043 since deposited on 2021-10-06
1last month
Acq. date: 2026-02-24
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Views
2043 since deposited on 2021-10-06
1last month
Acq. date: 2026-02-24
Citations