Browsing by author "Gouttebaron, R."
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Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
De Witte, Hilde; Conard, Thierry; Gouttebaron, R.; Magnee, R.; Caudano, R.; Vandervorst, Wilfried; Gijbels, Toon (1998) -
XPS study of ion induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Conard, Thierry; Sporken, R.; Gouttebaron, R.; Magnée, R.; Vandervorst, Wilfried; Caudano, R.; Gijbels, Renaat (2000)