Publication:
XPS study of ion induced oxidation of silicon with and without oxygen flooding
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-14
Acq. date: 2025-12-11
Views
1975 since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations
Metrics
Downloads
1 since deposited on 2021-10-14
Acq. date: 2025-12-11
Views
1975 since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations