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XPS study of ion induced oxidation of silicon with and without oxygen flooding
Publication:
XPS study of ion induced oxidation of silicon with and without oxygen flooding
Date
2000
Proceedings Paper
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4269.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Witte, Hilde
;
Conard, Thierry
;
Sporken, R.
;
Gouttebaron, R.
;
Magnée, R.
;
Vandervorst, Wilfried
;
Caudano, R.
;
Gijbels, Renaat
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1
since deposited on 2021-10-14
Acq. date: 2025-10-29
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1974
since deposited on 2021-10-14
1
last week
Acq. date: 2025-10-29
Citations
Metrics
Downloads
1
since deposited on 2021-10-14
Acq. date: 2025-10-29
Views
1974
since deposited on 2021-10-14
1
last week
Acq. date: 2025-10-29
Citations