Publication:

XPS study of ion induced oxidation of silicon with and without oxygen flooding

Date

2000
Proceedings Paper
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dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorSporken, R.
dc.contributor.authorGouttebaron, R.
dc.contributor.authorMagnée, R.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaudano, R.
dc.contributor.authorGijbels, Renaat
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T12:50:24Z
dc.date.available2021-10-14T12:50:24Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4285
dc.source.beginpage73
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
dc.source.conferencedate5/09/1999
dc.source.conferencelocationBrussel Belgium
dc.source.endpage76
dc.title

XPS study of ion induced oxidation of silicon with and without oxygen flooding

dc.typeProceedings paper
dspace.entity.typePublication
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