Publication:

Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

1991 since deposited on 2021-09-30
1last month
Acq. date: 2026-09-10

Citations

Statistics

Views

1991 since deposited on 2021-09-30
1last month
Acq. date: 2026-09-10

Citations