Publication:
Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
Date
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Gouttebaron, R. | |
| dc.contributor.author | Magnee, R. | |
| dc.contributor.author | Caudano, R. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Gijbels, Toon | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-09-30T11:44:48Z | |
| dc.date.available | 2021-09-30T11:44:48Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2510 | |
| dc.source.conference | SIMS Europe Workshop; 4-6 October 1998; Munster, Germany. | |
| dc.source.conferencelocation | ||
| dc.title | Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |