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Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
Publication:
Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
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Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Witte, Hilde
;
Conard, Thierry
;
Gouttebaron, R.
;
Magnee, R.
;
Caudano, R.
;
Vandervorst, Wilfried
;
Gijbels, Toon
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1988
since deposited on 2021-09-30
Acq. date: 2025-12-16
Citations
Metrics
Views
1988
since deposited on 2021-09-30
Acq. date: 2025-12-16
Citations