Browsing by author "Chang, Yi-Han"
Now showing items 1-3 of 3
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A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node
Tsai, Yi-Pei; Chang, Yi-Han; Wang, Jane; Trivkovic, Darko; Ronse, Kurt; Kim, Ryan Ryoung han (2022) -
Design, patterning, and process integration overview for 2nm node
Sherazi, Yasser; Chang, Yi-Han; Drissi, Youssef; Chehab, Bilal; Vega Gonzalez, Victor; Kim, Ryan Ryoung Han; Lee, Jae Uk (2022) -
Study of EUV stochastic defect on wafer yield
Tsai, Yi-Pei; Chang, Chieh-Miao; Chang, Yi-Han; Oak, Apoorva; Trivkovic, Darko; Kim, Ryan Ryoung han (2024)