Browsing by author "O'Connor, Rob"
Now showing items 1-2 of 2
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Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Zyulkov, Ivan; Madhivala, Viraj; Voronina, Ekaterina; Snelgrove, Matthew; Bogan, Justin; O'Connor, Rob; De Gendt, Stefan; Armini, Silvia (2020) -
Characterisation of electroless deposited cobalt by hard and soft X-ray photoemission spectroscopy
Brady-Boyd, Anita; O'Connor, Rob; Armini, Silvia; Zyulkov, Ivan; Selvaraju, V; Hughes, G; Bogan, Justin (2018)