Browsing by author "Keinonen, J."
Now showing items 1-2 of 2
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Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten
Mouroux, Aliette; Palmans, Roger; Keinonen, J.; Zhang, S. L.; Maex, Karen; Petersson, S. (1996) -
Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Zhang, S. L.; Palmans, Roger; Keinonen, J.; Petersson, C. S.; Maex, Karen (1995)