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Publication:

Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers

Date

1995

Journal article

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Author(s)

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;

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Petersson, C. S.

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Journal

Appl. Phys. Lett.

Statistics

1946 since deposited on 2021-09-29

Acq. date: 2026-07-14