Browsing by author "Hiro, Akito"

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One micron damascene redistribution for fan-out wafer level packaging using a photosensitive dielectric material

Flack, Warren; Hsieh, Robert; Nguyen, Ha-Ai; Slabbekoorn, John; Suhard, Samuel; Miller, Andy; Hiro, Akito; Hidremont, Romain (2018)
Ru CMP for advanced metallization

Teugels, Lieve; Heylen, Nancy; Ridremont, Romain; van der Veen, Marleen; Yamanaka, Tatsuya; Yamada, Yuuya; Nishimura, Kouhei; Buch, Xavier; Hiro, Akito; Vega Gonzalez, Victor; Struyf, Herbert (2019-09)