Ru CMP for advanced metallization

Thumbnail
Metadata
Show full item record
Authors
Teugels, Lieve; Heylen, Nancy; Ridremont, Romain; van der Veen, Marleen; Yamanaka, Tatsuya; Yamada, Yuuya; Nishimura, Kouhei; Buch, Xavier; Hiro, Akito; Vega Gonzalez, Victor; Struyf, Herbert
Conference
International Conference on Planarization/CMP Technology 2019
Title
Ru CMP for advanced metallization
Publication type
Proceedings paper
Collections