Publication:

Ru CMP for advanced metallization

Date

2019
Proceedings Paper
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Author(s)

Teugels, Lieve  
;
Heylen, Nancy  
;
Ridremont, Romain  
;
van der Veen, Marleen  
;
Yamanaka, Tatsuya
;
Yamada, Yuuya
;
Nishimura, Kouhei
;
Buch, Xavier
;
Hiro, Akito  
;
Vega Gonzalez, Victor  
;
Struyf, Herbert  

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1967 since deposited on 2021-10-27
Acq. date: 2026-08-05

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1967 since deposited on 2021-10-27
Acq. date: 2026-08-05

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