Browsing by author "Hoffman, M."
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Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Onsia, Bart; Schellkes, E.; Vos, Rita; De Gendt, Stefan; Doll, O.; Fester, A.; Kolbesen, B. O.; Hoffman, M.; Hatcher, Z.; Wolke, K.; Mertens, Paul; Heyns, Marc (2001) -
Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Onsia, Bart; Schellkes, E.; Vos, Rita; De Gendt, Stefan; Doll, O.; Fester, A.; Kolbesen, B.; Hoffman, M.; Hatcher, Z.; Wolke, K.; Mertens, Paul; Heyns, Marc (2002) -
Removal of submicrometer particles from silicon wafer surfaces using HF-based cleaning mixtures
Vos, Rita; Lux, Marcel; Xu, Kaidong; Fyen, Wim; Kenens, Conny; Conard, Thierry; Mertens, Paul; Heyns, Marc; Hatcher, Z.; Hoffman, M. (2001)