Authors

Vos, Rita; Lux, Marcel; Xu, Kaidong; Fyen, Wim; Kenens, Conny; Conard, Thierry; Mertens, Paul; Heyns, Marc; Hatcher, Z.; Hoffman, M.

Issue

12

Journal

Journal of the Electrochemical Society

Volume

148

Title

Removal of submicrometer particles from silicon wafer surfaces using HF-based cleaning mixtures

Publication type

Journal article