Browsing by author "Hartanto, Antony Winata"

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Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires

Saidov, Khakimjon; Erofeev, Ivan; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Hartanto, Antony Winata; Chen, Yifan; Yan, Hongwei; Tjiu, Weng Weei; Holsteyns, Frank; Mirsaidov, Utkur (2024)
Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits

Erofeev, Ivan; Hartanto, Antony Winata; Saidov, Khakimjon; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Tjiu, Weng Weei; Hui, Hui Kim; Holsteyns, Frank; Mirsaidov, Utkur (2024)